Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor
Reexamination Certificate
2011-05-17
2011-05-17
Ha, Nathan W (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Physical configuration of semiconductor
C257SE21219, C430S270100
Reexamination Certificate
active
07944025
ABSTRACT:
The invention includes a process whereby a solvent is utilized to remove soluble portions of a resist, and subsequently the solvent can be removed with a gas-fortified liquid. In particular aspects, the gas-fortified liquid emits bubbles during the removal of the solvent. Additionally, the gas-fortified liquid can be utilized to remove residual resist scum, and in such aspects the gas-fortified liquid can emit bubbles during the scum removal.
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Memorandum To: Dr. Roger Bonneccaze From: Cyrus R. Tabery Date: May 4, 2000 Subject: A report on shear and bending of a resist beam under the influence of surface tension forces; found at http://willson.cm.utexas.edu/ResearchSub.
NanoTech Wisconsin;Resist Collapse: Determination of Elastic Constants, by Kevin Van Workum et al.; May 3, 1999; found at http://www.xraylith.wise.edu/˜vanw/seminar/kevin.pdf.
Doan Trung Tri
Gilton Terry L.
Ha Nathan W
Micro)n Technology, Inc.
Wells St. John P.S.
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