Technique for electrochemically depositing an alloy having a...

Details Technique for electrochemically depositing an alloy having a... Technique for electrochemically depositing an alloy having a...

2011-07-26

2011-07-26

Wilkins, III, Harry D (Department: 1723)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Forming multiple superposed electrolytic coatings

C204S230200, C205S102000, C205S104000, C205S170000

Reexamination Certificate

active

07985329

ABSTRACT:
By providing two or more consumable electrodes within a single reactor vessel, an alloy having a high degree of chemical ordering may be deposited in situ in that the current flows of the individual consumable electrodes are controlled to obtain a substantially layered deposition of the two or more metals. Hence, especially in copper-based metallization layers, the advantage of enhanced resistance against electromigration offered by alloys may be achieved without unduly reducing the overall conductivity.

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