Mask plate handling method

Details Mask plate handling method Mask plate handling method

1976-01-26

1977-09-13

Werner, Frank E.

B65G 4791

Patent

active

040476278

ABSTRACT:
Apparatus and method for handling articles, such as glass or ceramic plates, commonly referred to as masks, employed in the manufacture of semi-conductor devices. The masks are transported between two predetermined stations with a treating operation being performed thereon at an intermediate station. The subject apparatus utilizes a fluid bearing for removing a plurality of masks in sequence from an indexable carrier and for accurately positioning the masks in sequence relative to a vacuum transfer arm. The transfer arm positions the masks in a precisely oriented location on a rotatable vacuum chuck so that a predtermined operation may be formed thereon. Another vacuum transfer arm then moves the treated masks in sequence from the vacuum chuck and places the same onto another fluid bearing for introduction thereby into another indexable carrier. Specially designed vacuum transfer arms, and means for accurately positioning masks in sequence relative to an infeed transfer arm for precise positioning thereby on the vacuum chuck, are employed so that damage to the relatively fragile masks during transfer to and from, and spinning at, the treating station is obviated.

REFERENCES:
patent: 3645581 (1972-02-01), Lasch, Jr. et al.
patent: 3797889 (1974-03-01), Wilkinson
patent: 3865254 (1975-02-01), Johannsmeier

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