Information processing apparatus for interference signal...

Details Information processing apparatus for interference signal... Information processing apparatus for interference signal...

2011-04-12

2011-04-12

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

C356S511000, C356S497000

Reexamination Certificate

active

07924426

ABSTRACT:
A shape measuring apparatus for measuring the shape of a measurement target surface includes an interferometer and computer. The interferometer senses interference light formed by measurement light from the measurement target surface and reference light by a photoelectric converter, while changing the light path length of the measurement light or the reference light. The computer Fourier-transforms a first interference signal sensed by the photoelectric converter to obtain a phase distribution and an amplitude distribution, shapes the amplitude distribution, inversely Fourier-transforms the phase distribution and the shaped amplitude distribution to obtain a second interference signal, and determines the shape of the measurement target surface based on the second interference signal.

REFERENCES:
patent: 5398113 (1995-03-01), de Groot
patent: 5706085 (1998-01-01), Blossey et al.
patent: 6028670 (2000-02-01), Deck
patent: 7289225 (2007-10-01), De Groot
patent: 2005/0078318 (2005-04-01), De Groot
patent: WO-02/082008 (2002-10-01), None

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