Electric heating – Metal heating – By arc
Reexamination Certificate
2011-05-31
2011-05-31
Paschall, Mark H (Department: 3742)
Electric heating
Metal heating
By arc
C219S121360, C219S121540, C219S121430, C118S7230IR
Reexamination Certificate
active
07952048
ABSTRACT:
A plasma source with discharge inducing bridges and a plasma processing system using the same. The plasma source may be constructed with a number of discharge inducing bridges, each discharge inducing bridge containing a magnetic core with a primary winding of a transformer. The discharge inducing bridges are positioned so as to face a susceptor. Each discharge inducing bridge is a hollow tube. When the electrical current of the primary winding of the transformer is driven, magnetic flux is induced to the magnetic core, so that inductive coupled plasma is formed around the discharge inducing bridges, and a plasma discharge is evenly induced horizontally/vertically along the discharge inducing bridges, so that uniform large-area high-density plasma is generated.
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Choi Dae-Kyu
Wi Soon-Im
New Power Plasma Co., Ltd.
NSIP Law
Paschall Mark H
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