Semiconductor device providing a first electrical conductor...

Details Semiconductor device providing a first electrical conductor... Semiconductor device providing a first electrical conductor...

2011-06-21

2011-06-21

Louie, Wai-Sing (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

C257S758000

Reexamination Certificate

active

07964972

ABSTRACT:
A semiconductor device100is provided with a multiplex through plug111that fills an opening extending through the silicon substrate101.The multiplex through plugs111comprises a column-shaped and solid first through electrode103,a first insulating film105that covers the cylindrical face of the first through electrode103,a second through electrode107that covers the cylindrical face of the first insulating film105and a second insulating film109that covers the cylindrical face of the second through electrode107,and these have a common central axis. The upper cross sections of the first insulating film105,the second through electrode107and the second insulating film109are annular-shaped.

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