Seal for a joint or juncture – Seal between fixed parts or static contact against... – Contact seal for other than internal combustion engine – or...
Reexamination Certificate
2011-05-17
2011-05-17
Pickard, Alison K (Department: 3676)
Seal for a joint or juncture
Seal between fixed parts or static contact against...
Contact seal for other than internal combustion engine, or...
C277S641000, C277S647000, C277S650000, C277S914000
Reexamination Certificate
active
07942425
ABSTRACT:
To make a plasma resistant seal excellent in both a plasma resisting performance and a sealing performance, and prevent an O-ring from protruding to a vacuum side gap, a plasma seal (6) made of PTFE having a plasma resisting performance is provided in a plasma irradiating side of an O-ring (5) as a main seal made of a rubber-like elastic material, an installation groove (4) shallower than a depth of an installation groove (3) provided in an installation member (2) is continuously provided in a plasma irradiation side of the installation groove (3), the O-ring (5) is attached to the installation groove (3), and the plasma seal (6) is attached to the installation groove (4) in a compressed state, or the O-ring is attached to the installation groove and the plasma seal is attached to the plasma irradiation side of the same installation groove (3) in a compressed state.
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Jacobson & Holman PLLC
NOK Corporation
Pickard Alison K
LandOfFree
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