Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-05-03
2011-05-03
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S067000, C359S507000, C359S819000
Reexamination Certificate
active
07936441
ABSTRACT:
An immersion projection optical system that prevents leakage of a liquid (immersion liquid) into the optical system and maintains satisfactory imaging capability. The projection optical system of the present invention is a projection optical system that projects a reduced image of a first plane onto a second plane through a liquid. The projection optical system includes an interface optical lens (Lb) having a side towards the first plane that contacts a gas and a side towards the second plane that contacts the liquid. The interface optical element includes a light entering surface (Lba), which has a convex shape facing towards the first plane, and a groove (Gr), which is formed to surround an effective region in a light emitting surface of the interface optical element.
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Klarquist & Sparkman, LLP
Kreutzer Colin
Nguyen Hung Henry
Nikon Corporation
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