Method and system for a two-step prediction of a quality...

Details Method and system for a two-step prediction of a quality... Method and system for a two-step prediction of a quality...

2011-07-05

2011-07-05

Teixeira Moffat, Jonathan C (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C702S082000, C702S084000, C700S109000

Reexamination Certificate

active

07974801

ABSTRACT:
By performing a two-step approach for predicting a quality distribution during the fabrication of semiconductor devices, enhanced flexibility and efficiency may be accomplished. The two-step approach first models electrical characteristics on the basis of measurement data, such as inline measurement data, and, in a second step, an appropriate distribution for the electrical characteristics may be established, thereby obtaining modeled wafer sort data which may then be used for predicting a quality distribution of the semiconductor devices under consideration.

REFERENCES:
patent: 6098024 (2000-08-01), Chen et al.
patent: 7085615 (2006-08-01), Persson et al.
patent: 7177773 (2007-02-01), Lonn et al.
patent: 7338818 (2008-03-01), Arroyo et al.
patent: 7349753 (2008-03-01), Paik
patent: 2004/0059456 (2004-03-01), Bode et al.
patent: 2004/0093107 (2004-05-01), Good et al.
patent: 2005/0071037 (2005-03-01), Strang
patent: 2005/0288812 (2005-12-01), Cheng et al.
patent: 2008/0140330 (2008-06-01), Morioka et al.
patent: 603 07 310 (2007-10-01), None
patent: 112007000868 (2009-02-01), None
Translation of Official Communication from German Patent Office for German Patent Application No. 10 2008 021 556.2-33 dated May 6, 2009.

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