Stage apparatus and exposure apparatus with...

Details Stage apparatus and exposure apparatus with... Stage apparatus and exposure apparatus with...

2011-01-04

2011-01-04

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C359S846000

Reexamination Certificate

active

07864298

ABSTRACT:
At least one exemplary embodiment is directed to a stage apparatus which comprises a movable stage, a mirror for reflecting light from an interferometer to measure the position of the stage, a heating-and cooling unit for heating or cooling the mirror, and a calculator for calculating the shape of the mirror. The shape of the mirror can be changed by controlling the heating-and-cooling unit according to the shape of the mirror obtained from the calculator.

REFERENCES:
patent: 6678038 (2004-01-01), Binnard
patent: 2002/0109850 (2002-08-01), Takai et al.
patent: 2004/0051984 (2004-03-01), Oshino et al.
patent: 2002-319541 (2002-10-01), None

Affiliated with

Also associated with

Rating

Stage apparatus and exposure apparatus with... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage apparatus and exposure apparatus with..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage apparatus and exposure apparatus with... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2659941