Method of manufacturing active matrix display device

Details Method of manufacturing active matrix display device Method of manufacturing active matrix display device

2011-01-18

2011-01-18

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C257SE21219, C216S002000

Reexamination Certificate

active

07871936

ABSTRACT:
A reduction in contaminating impurities in a TFT, and a TFT which is reliable, is obtained in a semiconductor device which uses the TFT. By removing contaminating impurities residing in a film interface of the TFT using a solution containing fluorine, a reliable TFT can be obtained.

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