Dielectric spacers for metal interconnects and method to...

Details Dielectric spacers for metal interconnects and method to... Dielectric spacers for metal interconnects and method to...

2011-04-12

2011-04-12

Landau, Matthew C (Department: 2813)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Junction field effect transistor

C257S522000, C257S758000

Reexamination Certificate

active

07923760

ABSTRACT:
A plurality of metal interconnects incorporating dielectric spacers and a method to form such dielectric spacers are described. In one embodiment, the dielectric spacers adjacent to neighboring metal interconnects are discontiguous from one another. In another embodiment, the dielectric spacers may provide a region upon which un-landed vias may effectively land.

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