Substrate processing method, substrate processing system,...

Details Substrate processing method, substrate processing system,... Substrate processing method, substrate processing system,...

2011-03-01

2011-03-01

Shechtman, Sean P (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S096000, C700S100000, C700S121000, C414S935000

Reexamination Certificate

active

07899568

ABSTRACT:
A substrate processing system of the present invention includes a transfer-in/out section for transferring-in/out a substrate and a processing section for performing a plurality of processing and treatments on the substrate, in which a throughput of substrate processing at a pre-stage performed from when the substrate is transferred in from the transfer-in/out section to when the substrate is transferred out to the external apparatus is set higher than a throughput of substrate processing at a post-stage performed from when the substrate is returned from the external apparatus into the processing section to when the substrate is returned into the transfer-in/out section.

REFERENCES:
patent: 4052603 (1977-10-01), Karlson
patent: 5858863 (1999-01-01), Yokoyama et al.
patent: 6873878 (2005-03-01), Liu et al.
patent: 2005/0256599 (2005-11-01), Peng
patent: 2926592 (1999-05-01), None
patent: 2006-287178 (2006-10-01), None

Affiliated with

Also associated with

Rating

Substrate processing method, substrate processing system,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate processing method, substrate processing system,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate processing method, substrate processing system,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2654712