Surface inspection method and inspecting device using the same

Details Surface inspection method and inspecting device using the same Surface inspection method and inspecting device using the same

2011-05-31

2011-05-31

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S237400

Reexamination Certificate

active

07952701

ABSTRACT:
If an illuminance of a measurement spot is limited in order to prevent heat damage on an article to be inspected, since detection sensitivity and a detection speed are in a relation of trade-off, it is difficult to improve one of them without sacrificing the other or to improve both of them. Also, there is a problem that the detection sensitivity is lowered on an outer circumference portion than on an inner circumference portion of the article to be inspected.A plurality of measurement units comprising an illumination optics, a measurement spot, a collection optics, and a light detection optics are provided, inspection results obtained from the plurality of measurement spots are integrated, and light-amount distribution to each measurement spot is controlled according to a scan radial position.

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U.S. Appl. No. 12/207,536, filed Sep. 10, 2008, Matsui.

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