Measurement apparatus, exposure apparatus, and device...

Details Measurement apparatus, exposure apparatus, and device... Measurement apparatus, exposure apparatus, and device...

2011-04-12

2011-04-12

Nguyen, Hung Henry (Department: 2882)

Optics: measuring and testing

Photometers

Photoelectric

C355S053000

Reexamination Certificate

active

07924416

ABSTRACT:
A substrate stage holds a substrate irradiated with exposure light via a liquid. A measurement apparatus measures information on the exposure light and has a light receiving device detachable from the substrate stage. The light receiving device receives the exposure light while being held in the substrate stage.

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