Six-mirror EUV projection system with low incidence angles

Details Six-mirror EUV projection system with low incidence angles Six-mirror EUV projection system with low incidence angles

2011-07-05

2011-07-05

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

07973908

ABSTRACT:
The invention relates to a projection system for guiding light with wavelengths ≦193 nm from an object plane to an image plane, comprising at least a first mirror, a second mirror, a third mirror, a fourth mirror, a fifth mirror and a sixth mirror centered around an optical axis and being arranged along the optical axis, with the light traveling from the object plane to the first mirror, then from the first mirror to the second mirror then from the second mirror to the third mirror, then from the third mirror, the fourth mirror, then from the fourth mirror to the fifth mirror and then from the fifth mirror to the sixth mirror. The invention is characterized in that the first mirror is arranged along the optical axis geometrically between the fifth mirror and the sixth mirror, and the third mirror is a convex mirror.

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patent: 6195201 (2001-02-01), Kock et al.
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patent: 1 450 209 (2004-08-01), None
patent: 2004-010224 (2004-01-01), None
patent: WO 2004/010224 (2004-01-01), None
Bal, Matthieu Frédéric, dissertation “Next-Generation Extreme Ultraviolet Lithographic Projection Systems”, pp. 1-139, (Feb. 10, 2003).

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