Integrated circuit with stress sensing element

Details Integrated circuit with stress sensing element Integrated circuit with stress sensing element

2011-07-19

2011-07-19

Caputo, Lisa M (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

Reexamination Certificate

active

07980138

ABSTRACT:
An integrated circuit includes a semiconductor die, and a stress sensing element. The stress sensing element comprises a first lateral resistor and a first vertical resistor. The stress sensing element is formed in the semiconductor die and is configured to indicate a level of at least one stress component within the semiconductor die.

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