Image analysis – Image transformation or preprocessing – Selecting a portion of an image
Reexamination Certificate
2011-01-04
2011-01-04
Werner, Brian P (Department: 2624)
Image analysis
Image transformation or preprocessing
Selecting a portion of an image
C718S105000
Reexamination Certificate
active
07865037
ABSTRACT:
An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node includes memory sufficient to buffer the data until it can process the data. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.
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Bhaskar Krishnamurthy
Bubna Kishore
Lin Jason Z.
Miller Lawrence R.
Rosengaus Eliezer
Kla-Tencor Corporation
Luedeka Neely & Graham P.C.
Rosario Dennis
Werner Brian P
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