Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Reexamination Certificate
2011-02-01
2011-02-01
Toledo, Fernando L (Department: 2895)
Coating processes
Coating by vapor, gas, or smoke
Base includes an inorganic compound containing silicon or...
C427S255370, C427S523000, C427S524000, C427S096700, C427S096800, C427S255260, C427S287000, C427S295000, C427S294000, C427S597000, C427S593000, C427S585000, C427S584000, C427S579000, C118S050000, C118S050100, C118S715000, C118S722000, C118S7230AN, C118S7230VE, C118S724000, C118S725000, C118S719000, C428S472000, C428S472100, C428S472200, C428S336000, C428S446000, C428S469000, C428S629000, C428S697000, C438S680000, C438S765000, C438S773000, C438S770000, C438S785000, C148S095000, C148S240000, C148S280000, C148S
Reexamination Certificate
active
07879400
ABSTRACT:
There is provided a substrate processing apparatus equipped with a metallic component, with at least a part of its metallic surface exposed to an inside of a processing chamber and subjected to baking treatment at a pressure less than atmospheric pressure. As a result of this baking treatment, a film which does not react with various types of reactive gases, and which can block the out diffusion of metals, is formed on the surface of the above-mentioned metallic component.
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Maeda Kiyohiko
Maeda Takahiro
Ozaki Takashi
Dulka John P
Hitachi Kokusal Electric Inc.
Oliff & Berridg,e PLC
Toledo Fernando L
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