Microfluidic device and method of operation

Details Microfluidic device and method of operation Microfluidic device and method of operation

2011-04-12

2011-04-12

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Mass flow by imparting angular or transverse momentum to the...

Reexamination Certificate

active

07921737

ABSTRACT:
A microelectromechanical system (MEMS) device and method for operating the device to determine a property of a fluid. The device has a tube that extends from a base and is spaced apart from a substrate surface for vibrational movement in a plane normal to the surface. The tube defines a continuous internal passage having a fluid inlet and fluid outlet fluidically connected to the base. A cantilevered member attached to a distal portion of the tube opposite the base is configured for vibrational movement relative to the distal portion. A drive electrode operable to induce vibrational movements in the tube and cantilevered member is disposed on the substrate surface. Sensing electrodes are disposed on the substrate surface for sensing Coriolis-induced deflections of the tube when vibrated, generating outputs from which a property of a fluid flowing through the tube can be determined.

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