Thin film capacitor

Details Thin film capacitor Thin film capacitor

2011-04-19

2011-04-19

Thomas, Eric (Department: 2835)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S311000

Reexamination Certificate

active

07929272

ABSTRACT:
A dielectric device having a dielectric layer and first to nth metal layers (where n is an integer of 2 or greater) in contact with the dielectric layer. At least one of the first to nth metal layers contains a base metal. Interfaces between the first to nth metal layers and the dielectric layer have respective arithmetic mean roughnesses of Ra1to Ran(nm), while an average value Ram (nm) of the arithmetic mean roughnesses of Ra1to Ran(nm) and a thickness T (nm) of the dielectric layer satisfy T/Ram ≧1.3.

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