Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-06-28
2011-06-28
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C134S001000
Reexamination Certificate
active
07969548
ABSTRACT:
An immersion lithographic projection apparatus having a megasonic transducer configured to clean a surface and a method of using megasonic waves to clean a surface of an immersion lithographic projection apparatus are disclosed.
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Beeren Raymond Gerardus Marius
Cuijpers Johannes Wilhelmus Jacobus Leonardus
Jansen Hans
Stavenga Marco Koert
Wanten Peter Franciscus
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
Whitesell-Gordon Steven H
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