Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
1999-12-21
2001-10-23
Bratlie, Steven A. (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
C414S416030, C414S939000, C414S941000
Reexamination Certificate
active
06305895
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates generally to a transfer system, which is provided in a vacuum process equipment for an object to be processed, such as a semiconductor wafer or an LCD substrate, for carrying the object into/out of a process chamber.
2. Description of the Related Art
In each of processes for producing semiconductor devices, a transfer system is used for delivering a semiconductor wafer serving as an object to be processed, from a clean room to a process chamber for carrying out a predetermined process, or for delivering a processed semiconductor wafer from the process chamber to the clean room.
As transfer arms serving as transfer systems, there are known a selective compliance assembly robot arm (SCARA) type single pickup, an SCARA type twin pickup, an SCARA dual arm type, a frog leg type and so forth. All of these transfer arms have an articulated structure wherein an arm is pivotably connected. The arm has a swivel mechanism on the proximal end side thereof, and a pick for supporting a semiconductor wafer on the tip side thereof, so as to transfer the wafer by the swiveling motion of the arm and the telescopic motion of a joint portion.
However, the above described transfer systems, such as the SCARA type twin pickup, the SCARA dual arm type and the frog leg type, have a structure complicated by the articulated structure. Therefore, the above described transfer systems have a high rate of occurrence of dust, lack in reliability on transfer and increase costs. In addition, if the transfer system is provided in a load-lock chamber of a semiconductor process equipment, it is required to ensure a space for the swiveling and telescopic motions of the arm, so that the size of the load-lock chamber is increased to cause the increase of the size and costs of the whole system.
SUMMARY OF THE INVENTION
It is therefore an object of the present invention to eliminate the aforementioned problems and to provide a transfer system which can be small and inexpensive by simplifying the structure and operation thereof and which can prevent an object to be processed from being influenced by dust while the object is transferred in a load-lock chamber.
In order to accomplish the aforementioned and other objects, according to one aspect of the present invention, there is provided a transfer system, for use in a vacuum process equipment comprising a process chamber and a load-lock chamber, for carrying an object to be processed, into/out of the process chamber, the transfer system comprising: a first chamber formed in the load-lock chamber; a second chamber formed in the load-lock chamber, the second chamber having an internal pressure which is set to be lower than an internal pressure of the first chamber; linearly moving transfer arm means, provided in the first chamber, for carrying the object to be processed; and a driving part, provided in the second chamber, for linearly moving the transfer arm means with respect to the process chamber.
According to the present invention, the object to be processed can be carried into/out of the process chamber by means of the transfer arm means linearly moved with respect to the process chamber. Therefore, the structure and operation of the transfer system can be simplified to miniaturize the load-lock chamber to reduce the costs of the system. In addition, it is possible to inhibit dust from being produced in the transfer arm portion by using the above described transfer arm, and it is possible to prevent dust from entering the first chamber by setting the internal pressure in the second chamber, in which the driving part is provided, to be lower than the internal pressure in the first chamber, in which the transfer arm is provided. Therefore, the object to be object is not influenced by dust while the object is transferred in the load-lock chamber.
The transfer arm means may have a pair of arm members, each of which has a proximal end portion connected to the driving part, and a distal end portion having a supporting portion for supporting thereon the object to be processed.
Alternatively, the transfer arm means may have a single arm member which has a proximal end portion connected to the driving part, and a distal end portion having a supporting portion for supporting thereon the object to be processed.
The transfer arm means may have a linearly moving arm member connected to the driving part, and a swivel arm member which is pivotably connected to the linearly moving arm member and which has a supporting portion for supporting thereon the object to be processed.
The transfer arm means may comprise upper-stage and lower-stage transfer arms, each of the transfer arms having a pair of arm members, each of the arm members having a proximal end portion connected to the driving part, and a distal end portion having a supporting portion for supporting thereon the object to be processed, and the driving part independently driving each of the transfer arms.
Alternatively, the transfer arm means may comprise upper-stage and lower-stage transfer arms, each of the transfer arms having a single arm member, the arm member having a proximal end portion connected to the driving part, and a distal end portion having a supporting portion for supporting thereon the object to be processed, and the driving part independently driving each of the transfer arms.
The driving part may comprise a motor, a ball screw rotated by the motor, and a nut which is engaged with the ball screw and which linearly moves.
The transfer system may further comprise a buffer mechanism, provided in the load-lock chamber, for receiving the object supported on the transfer arm means.
The transfer system may further comprise a pre-alignment mechanism, provided in the load-lock chamber, for pre-aligning the object supported on the transfer arm means.
REFERENCES:
patent: 4775281 (1988-10-01), Prentakais
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5658115 (1997-08-01), Yamazaki et al.
patent: 9-131680 (1997-05-01), None
Hirose Eiji
Hirose Jun
Ohara Makoto
Ozawa Jun
Bratlie Steven A.
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
LandOfFree
Transfer system for vacuum process equipment does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Transfer system for vacuum process equipment, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Transfer system for vacuum process equipment will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2594603