Defect judgement processing method and apparatus

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Details

C348S126000

Reexamination Certificate

active

06333992

ABSTRACT:

BACKGROUND OF THE INVENTION
The present invention relates to a defect judgement processing method and apparatus which selectively collects necessary image data from a detected image and applies image processing operation to the collected image data to perform defect judgement.
In conventional visual inspections, there has been known a technique by which positional information on inspection points of such an object to be inspected as, e.g., a parts-mounted substrate are previously registered as inspection window data so that an image including the inspection points is detected to perform defect judgement on the basis of image processing of ranges indicated by the inspection window data.
The aforementioned prior art, which requires a lot of parameters for use in the image processing and defect judgement and further requires parameters corresponding to various types of parts to be separately set, has had a problem that it takes a lot of time to optimize the parameters.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide a defect judgement processing method and apparatus which can optimize image processing parameters and defect judgement parameters of the detection image cut out by each inspection window to eliminate erroneous judgement for a good product or defect missing and to thereby realize reliable defect judgement.
An other object of the present invention is to provide a defect judgement processing method and apparatus which, when performing reliable defect judgement of a detection image cut out by each inspection window, can optimize, in simulation, image processing parameters and defect judgement parameters to avoid judgement of a good product as wrong or defect missing.
In accordance with the present invention, the above objects are attained by providing a defect judgement processing method which is characterized by comprising the steps of detecting by image detection means an image of an object to be inspected, cutting out by image data generator means ranges indicated by a plurality of predesignated inspection windows from the detected image and storing the ranges in memory means, generating by window data generator means window data having an inspection condition attached thereto for each of said plurality of inspection windows and storing the window data in said memory means, reading out by a feature extractor the detection image of the range indicated by each inspection window from said memory means, reading out the window data corresponding to the respective inspection windows stored in said memory means and extracting a structural feature parameter therefrom on the basis of an image processing parameter conforming to the inspection condition obtained by each window data, and performing by a defect judger its defect judging operation over the extracted structural feature parameter on the basis of a defect judgement parameter conforming to said inspection condition.
Further, in accordance with the present invention, there is provided a defect judgement processing method which is characterized by comprising the steps of detecting by image detection means an image of an object to be inspected, cutting out by image data generator means ranges indicated by a plurality of predesignated inspection windows from the detected image and storing the ranges in memory means, generating by window data generator means window data having an inspection condition attached thereto for each of said plurality of inspection windows and storing the window data in said memory means, reading out by a feature extractor the window data corresponding to the respective inspection windows stored in said memory means, selecting an image processing parameter conforming to the inspection condition obtained by each window data and further extracting a structural feature parameter from the detection image of the range indicated by each inspection window read out from said memory means on the basis of said selected image processing parameter, and selecting by a defect judger the structural feature parameter conforming to said inspection condition and performing its defect judging operation over the extracted structural feature parameter on the basis of said selected defect judgement parameter.
In accordance with the present invention, there is provided a defect judgement processing method which is characterized by comprising the steps of detecting by image detection means an image of an object to be inspected, cutting out by image data generator means ranges indicated by a plurality of predesignated inspection windows from the detected image and storing the ranges in memory means, generating by window data generator means window data having an inspection condition attached thereto for each of said plurality of inspection windows and storing the window data in said memory means, reading out a feature extractor the detection image of the range indicated by each inspection window from said memory means, reading out the window data corresponding to the respective inspection windows stored in said memory means and extracting a structural feature parameter therefrom on the basis of an image processing parameter conforming to the inspection condition obtained by each window data, and performing by a defect judger its defect judging operation over the extracted structural feature parameter on the basis of a defect judgement parameter conforming to said inspection condition and comparing its defect judgement with defect information previously stored as associated with said each inspection window to detect erroneous judgement or defect missing.
In accordance with the present invention, there is provided a defect judgement processing method which is characterized by comprising the steps of detecting by image detection means an image of an object to be inspected, cutting out by image data generator means ranges indicated by a plurality of predesignated inspection windows from the detected image and storing the ranges in memory means, generating by window data generator means window data having an inspection condition attached thereto for each of said plurality of inspection windows and storing the window data in said memory means, reading out by a feature extractor the detection image of the range indicated by each inspection window from said memory means, reading out the window data corresponding to the respective inspection windows stored in said memory means and extracting a structural feature parameter therefrom on the basis of an image processing parameter selected according to the inspection condition obtained by each window data, and performing by a defect judger its defect judging operation over the extracted structural feature parameter on the basis of a defect judgement parameter selected according to said inspection condition, comparing its defect judgement with defect information previously stored as associated with said each inspection window to detect erroneous judgement or defect missing, and optimizing said selected image processing parameter or defect judgement parameter according to the detected erroneous judgement or defect missing.
In accordance with the present invention, there is provided a defect judgement processing method which is characterized by comprising the steps of detecting by image detection means an image of an object to be inspected, cutting out by image data generator means ranges indicated by a plurality of predesignated inspection windows from the detected image and storing the ranges in memory means, generating by window data generator means window data having an inspection condition attached thereto for each of said plurality of inspection windows and storing the window data in said memory means, reading out by a feature extractor the detection image of the range indicated by each inspection window from said memory means, reading out the window data corresponding to the respective inspection windows stored in said memory means and extracting a structural feature parameter therefrom on the basis of an image processing parameter conforming to the ins

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