Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
1999-03-30
2001-01-23
Mills, Gregory (Department: 1763)
Coating apparatus
Gas or vapor deposition
With treating means
C118S715000, C156S345420
Reexamination Certificate
active
06176933
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of Invention
The present invention relates to an end point window assembly in an etching apparatus for fabricating semiconductor devices, more particularly, to a movable spare end point window in an etching apparatus wherein a contaminated end point window is movable so as to be replaced in action by a new window if the spare end point window is sufficiently contaminated by by-products which are generated from reactive rays of plasma gas in a process chamber of the apparatus.
2. Discussion of Related Art
Various methods of etching are used in the fabrication of semiconductor devices. Plasma gas is effective for etching nitride oxide, polycrystalline silicon, and silicon oxide. With plasma gas etchings, an end point detection mechanism for detecting an ending point of an etching process, for informing a worker of the end of etching, and for terminating the etching process is installed in a plasma etch apparatus.
The operational principle of the end point detection mechanism is that each plasma reaction ray generated from the plasma gas has a unique color corresponding to a reaction of the plasma gas with a given film of a process layer on a wafer. Namely, each process layer is clearly identifiable in accordance with colors generated from reactions with each process layer, which are distinguished from one another by spectrum analysis.
Accordingly, in the conventional end point detection mechanism, the etch process is terminated when a unique spectrum corresponding to the last process layer is detected after the spectrums of plasma rays generated from etching the wafer have been analyzed. The end point detection mechanism is connected to a side of a process chamber through a quartz end point window.
FIG. 1
shows an end point detection mechanism according to a conventional art.
Referring to
FIG. 1
, a wafer is mounted in a process chamber
1
. An optic cable
3
transmits plasma reaction rays to a monochromator
5
and is connected to a side of the process chamber
1
. An end point window assembly
7
is provided between the process chamber
1
and the optic cable
3
and transmits the plasma reaction rays while blocking passage of reaction by-products. Monochromator
5
analyzes the spectra of the plasma reaction rays and outputs analog signals corresponding thereto. An interface board
9
converts the analog signals into digital signals. The digital signals are then passed to a display
11
where the digital signals are made visible.
The monochromator
5
analyzes the spectra of the plasma reaction rays incident from the optic cable
3
and includes a diffraction grid
13
, a motor
15
rotating the diffraction grid
13
in an arbitrary direction, and a photo multiplier tube
17
for converting the values of the spectra reflected by the diffraction grid
13
into analog signals.
FIG. 2
shows the disassembled parts of the conventional end point window assembly.
Referring to
FIG. 2
, the end point window, through which the plasma reaction rays enter the end point detection mechanism
2
, includes an end point bracket
19
connected to the process chamber
1
and having an inducing tube
21
to which the optic cable
3
is connected. A quartz window
23
which blocks passage of the polymers of by-products generated by the etching process lies between the end point bracket
19
and the process chamber
1
. An O-ring
25
is positioned inserted around the quartz window
23
and seals a gap between the quartz window
23
and the process chamber
1
. A UV filter
27
is installed on the front (exterior side) of the quartz window
23
.
The plasma reaction rays enter the conventional end point detection mechanism
2
in the following manner.
Plasma reaction rays, which are generated from the reactions between a given process layer on a wafer and the plasma gas in the process chamber
1
, are transmitted to the end point detection mechanism
2
through the end point window assembly
7
and the optic cable
3
. More specifically, having been filtered through UV filter
27
and passed through the quartz window
23
, the plasma reaction rays are carried to the optic cable
3
connected to the inducing tube
21
of the end point bracket
19
.
The plasma reaction rays incident on the end point detection mechanism
2
undergo spectral analysis by way of the monochromator
5
and then are output as analog signals corresponding to the intensity of the plasma.
Such analog signals are converted into digital signals by the interface board
9
in a known manner. Then, the results of the spectral analyses are shown in the display as a picture. Accordingly, the etching process in the process chamber is terminated once the spectrum corresponding to the last process layer on the wafer is detected.
However in the conventional art, polymers generated by the etching process attach to and accumulate on the quartz window and form a byproduct layer. This contaminates the quartz window and prevents the plasma reaction rays from being transmitted by the quartz window, thereby making it difficult to determine the exact end point of etch.
Moreover, frequent disassembly and cleaning is necessary to prevent the polymers from accumulating on the end point window according to the conventional art. This causes a high degree of abrasion of parts and tends to damage the fragile quartz window.
SUMMARY OF THE INVENTION
Accordingly, the present invention is directed to an end point window assembly in an etching apparatus that substantially obviates one or more of the above-mentioned problems caused by limitations and disadvantages of the conventional art.
An object of the present invention is to provide an end point window assembly in an etching apparatus which prevents malfunctions caused by accumulated polymers by installing a spare window between a main end point window and a process chamber and by thereafter moving the spare end point window, once contaminated by accumulated polymers, into an end point window bracket so as to not block transmission of plasma reaction rays.
Another object of the present invention is to provide an end point window assembly in an etching apparatus which prevents parts from being damaged because the time interval between times for disassembling and cleaning the apparatus is increased.
Additional features and advantages of the invention will be set forth in the description which follows and in part will be apparent from the description, or may be learned by practice of the infinitives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
To achieve these and other advantages, and in accordance with the purposes, of the present invention, as embodied and broadly described, the present invention includes an end point bracket including an inducing tube connected to an optic cable, wherein the end point bracket is connected to a process chamber. A main window separates a space between the optic cable and the process chamber. The end point window assembly according to the present invention further includes at least a spare window insertion groove provided between the main window and the process chamber about the inner circumference of the inducing tube, a spare window guiding groove corresponding in location with the spare window insertion groove, wherein the spare window guiding groove communicates with an interior of a body of the end point bracket. A spare window is slidably disposed in the spare window guiding groove, whereby the spare window selectively closes off the inducing tube. A spare window moving mechanism is provided for transferring the spare window along the spare window guiding groove in accordance with an extent of the contamination.
Accordingly, the plasma reaction rays pass through and the by-product polymers are cut off since the gap between the process chamber and the optic cable is sealed up by the spare window selectively moved by the mechanism for transferring the spare window along the insertion g
Hassanzadeh P.
Hyundai Electronics Industries Co,. Ltd.
Mills Gregory
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