Fluid handling – Systems – With flow control means for branched passages
Reexamination Certificate
1998-10-09
2001-08-14
Shaver, Kevin (Department: 3754)
Fluid handling
Systems
With flow control means for branched passages
C251S367000
Reexamination Certificate
active
06273139
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to fluid control apparatus, for example, for use in semiconductor manufacturing equipment.
The terms “upper” and “lower” as used herein refer respectively to the upper and lower sides of FIG.
1
. However, these terms are used for the sake of convenience; the apparatus to be described can be used as turned upside down or as laid on its side.
It is required in recent years that the fluid control apparatus for use in semiconductor manufacturing equipment be installable in a diminished space and have channels of reduced volume. To fulfill this requirement, JP-A No. 172265/1993 proposes a unit of at least three monofunctional members (such as a filter, massflow controller and on-off valve) which are directly connected together (integrated).
In addition to the above requirement, a decrease in the number of components, ease of maintenance and reduced pressure losses are also required of the fluid control apparatus for use in semiconductor manufacturing equipment. No fluid control apparatus meeting these requirements are known at present.
SUMMARY OF THE INVENTION
An object of the present invention is to provide a fluid control apparatus which fulfills all the requirements of integration, reduction in the number of components and facilitated maintenance.
Another object of the invention is to provide a fluid control apparatus which further fulfills the requirement of reduced pressure losses.
The present invention provides a fluid control apparatus comprising a plurality of fluid control members arranged at an upper level and a plurality of couplings arranged at a lower level, at least one of the fluid control members comprising a plurality of monofunctional members integrally provided on a blocklike body, the blocklike body being mounted on at least one of the couplings so as to be removable upward.
Examples of monofunctional members are on-off valves, pressure regulators, filters, pressure sensors, etc. The fluid control member is, for example, a unit of two or three on-off valves as mounted on a blocklike body, or a unit of a pressure regulator and a pressure sensor which are mounted on a blocklike body.
With the fluid control apparatus of the invention, a plurality of monofunctional members are integrally provided on a blocklike body. This reduces the number of components such as blocklike bodies and seal members. When there arises a need to replace one of the plurality of monofunctional members, the fluid control member is removed upward from the apparatus, and the particular monofunctional member is then replaced, hence facilitated maintenance. It is desired that monofunctional members which require replacement less frequently be integrally provided on a single blocklike body as a fluid control member, and that monofunctional members which are to be replaced frequently be used singly as individual fluid control members. Both the reduction in the number of components and ease of maintenance can then be attained readily.
Preferably, at least one of the couplings which causes one of the fluid control members to communicate with the fluid control member adjacent thereto is a blocklike coupling having a V-shaped communication channel. The two adjacent fluid control members can then be held in communication with each other by the single coupling. This results in a further reduction in the number of components.
Preferably, at least one of the couplings which causes one of the fluid control members to communicate with the fluid control member adjacent thereto comprises two blocklike components butting against each other to form a U-shaped communication channel. In the case of V-shaped communication channels, the cross sectional area of the channel is smaller than the area of the opening thereof by an amount attributable to the inclination of the channel, whereas the cross sectional area of the U-shaped channel can be the same as the opening area thereof. The U-shaped channel can therefore be given a greater diameter than the V-shaped channel, consequently reducing the pressure loss involved in the fluid control apparatus.
REFERENCES:
patent: 3654960 (1972-04-01), Kiernan
patent: 3831951 (1974-08-01), Patel et al.
patent: 4168724 (1979-09-01), Graffunder et al.
patent: 4257439 (1981-03-01), Mayeaux
patent: 4930401 (1990-06-01), Cameron et al.
patent: 5368062 (1994-11-01), Okumura et al.
patent: 5720317 (1998-02-01), Nimberger
patent: 5819782 (1998-10-01), Itafuji
patent: 5983933 (1999-11-01), Ohmi et al.
patent: 5992463 (1999-11-01), Redemann et al.
patent: 6012479 (2000-01-01), Fukushima et al.
Hirose Takashi
Ikeda Nobukazu
Masuda Naoya
Ohmi Tadahiro
Yamaji Michio
Armstrong Westerman Hattori McLeland & Naughton LLP
Bastianelli John
Fujikin Inc.
Shaver Kevin
LandOfFree
Fluid control apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Fluid control apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fluid control apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2494460