Optical system for surface topography measurement

Details Optical system for surface topography measurement Optical system for surface topography measurement

1980-02-04

1982-07-20

Corbin, John K.

Optics: measuring and testing

By polarized light examination

With birefringent element

G01B 1124

Patent

active

043403069

ABSTRACT:
An interferometric system for characterizing the surface of a test object, such as an aspheric surface. A white light interferogram is produced wherein the principal fringe indicates zero optical path difference between a test surface and a reference surface. Wavefronts from either of the test or reference surfaces are translated by incremental amounts and after each translation the position of the principal fringe is noted by observing the loci of points of maximum contrast. By recording the points of maximum contrast and the incremental wavefront translation, two dimensional plots showing zero optical path differences for the two surfaces are obtained, thereby comparing the test and reference surfaces.

REFERENCES:
patent: 3512891 (1970-05-01), Baldwin
patent: 3694088 (1972-09-01), Gallagher
patent: 3937580 (1976-02-01), Kasdan
patent: 4022532 (1977-05-01), Montagnino
Malacara, "Optical Shop Testing", (Wiley), pp. 17-19.
Massie, N. A., "Quasi-Reac-Time High Precision . . . Surfaces", SPIE, vol. 153, 1978, pp. 126-132.
Augustyn, Walter H., "Automatic Data Reduction . . . Patterns", SPIE, vol. 171, 1979, pp. 22-31.

Affiliated with

Also associated with

Rating

Optical system for surface topography measurement does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical system for surface topography measurement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical system for surface topography measurement will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-248074