Data processing: generic control systems or specific application – Generic control system – apparatus or process – Supervisory control
Reexamination Certificate
1994-02-02
2001-03-27
Grant, William (Department: 2121)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Supervisory control
C700S002000, C709S241000
Reexamination Certificate
active
06208904
ABSTRACT:
TECHNICAL FIELD
This invention relates generally to data communications protocol conversion, and more particularly, to a protocol converter for interfacing various on-line process equipment with a host computer in a semiconductor manufacturing environment.
BACKGROUND ART
Currently, there is no standard mode of communication between intelligent systems in a computer integrated semiconductor manufacturing environment. As a result, protocol converter systems are employed to act as translators to allow intelligent devices from different manufacturers to communicate with one another. The special purpose protocol converter systems intended to convert specific communications protocols in a manufacturing environment are extremely expensive and designed hard-coded to a specific piece of equipment. The existing general purpose protocol converters are primarily intended for connection of devices with different handshaking schemes, i.e. computer to printer, or between different networks. These converters are not sophisticated enough to provide even minimal functionality in a semiconductor manufacturing environment. For example, the existing protocol converters cannot provide without extensive modifications:
configurability for different applications in a manufacturing environment,
extensibility to various communication protocols,
user friendly interface,
high data conversion/throughput rates,
remote system access and maintenance,
error checking capability,
message reformatting capability,
parallel input/output (I/O) link to process equipment for checking various manufacturing conditions,
printer interface,
adherence to specific communication standards,
easy software support.
In view of the above, it would be desirable to provide an improved general purpose data communications protocol converter for interfacing a host computer with manufacturing process equipment, that provides the above-indicated features.
DISCLOSURE OF THE INVENTION
Accordingly, one advantage of the invention is in providing a general purpose data communications protocol converter for interfacing a host computer with manufacturing process equipment in a computer integrated manufacturing environment, that is easily configurable for different applications.
Another advantage of the invention is in providing a protocol converter extensible to various communication protocols.
A further advantage of the invention is in providing a protocol converter having a user friendly interface.
Another advantage of the invention is in providing a protocol converter with increased data conversion/throughput rates.
Another advantage of the invention is in providing remote system access and maintenance of a protocol converter.
A further advantage of the invention is in providing a protocol converter having ability to perform error checking of message parameter contents.
Another advantage of the invention is in providing a protocol converter having ability to perform message reformatting.
Another advantage of the invention is in providing in a protocol converter, a parallel input/output (I/O) link to the process equipment for checking various manufacturing conditions.
A further advantage of the invention is in providing, in a protocol converter, a printer interface that allows a user to output hard copies of source code, communications logs, error logs, etc.
Another advantage of the invention is in providing a protocol converter that can meet specific industry communication standards.
Another advantage of the invention is in providing easy software support of a protocol converter.
A further advantage of the invention is in providing a low cost specific communication standard protocol converter.
The above and other advantages of the invention are achieved, at least in part, by providing a data communications protocol converter that comprises a controller responsive to first messages received from a host computer and process equipment for forming second messages sent to the process equipment and the host computer, and a data acquisition system responsive to a check signal from the controller for checking an operation condition of the process equipment. Data communication protocol of the host computer differs from data communication protocols of the process equipment.
In accordance with a preferred embodiment of the invention, the converter may further comprise a user interface coupled to the controller for defining and controlling parameters of the controller. The user interface may define structures, templates and conversation sequences of the second messages and also define line protocols for communication between the controller and the process equipment, and between the controller and the host computer.
Moreover, the converter may comprise a support workstation coupled to the controller through a telecommunication network for remote defining and controlling parameters of the controller through the communication network.
In accordance with one aspect of the invention, the data acquisition system checks manufacturing process conditions (physical interlock) of the process equipment. The controller sends to the host computer an error message in response to an error signal from the data acquisition system.
In accordance with another aspect, the controller comprises a message processing means for analyzing the first messages and forming the second messages, first message receiving means and second message sending means corresponding to the host computer and the process equipment. The first message receiving means put the first messages in a first queue. The message processing means analyzes the first queue of messages, forms the second messages and puts the second messages in a second queue. The second message sending means receive corresponding second messages of the second queue in accordance with their destination.
In accordance with a further aspect of the invention, the process equipment may comprise a plurality of process units. The controller is responsive to each of the process units, and the data acquisition system is coupled to each of the process units for checking their operation conditions. The controller comprises separate first message receiving means for the host computer and each of said process units, and separate second message sending means for the host computer and each of the process units. The process units may have different data communication protocols.
In the preferred embodiment, the protocols meet Semiconductor Equipment Communication Standard (SECS).
In accordance with the method of this invention, the following steps are carried out:
processing by a controller first messages received from the host computer and process equipment for forming second messages sent to the process equipment and host computer, and
checking by a data acquisition system responsive to the controller an operation condition of the process equipment to send an error message to the host computer in response to a predetermined condition.
The method preferably is practiced in the semiconductor manufacturing environment and may comprise the step of defining and controlling parameters of the protocol conversion through an user interface, and the step of remote defining and controlling parameters of the protocol conversion through a telecommunication network.
The step of processing more particularly comprises the steps of:
handling by receiving means first line protocols of data communication between the controller and the host computer and process equipment to receive the first messages,
putting the first messages in a message queue,
analyzing the first messages in accordance with predetermined parameters of the protocol conversion to form the second messages,
putting the second (reply) messages in the queue,
sending the second messages to the sending means in accordance with their destination, and
handling by the sending means second line protocols of data communication between the controller and the host processor and process equipment to send the second messages.
In the preferred embodiment, the step of analyzing also involves sending a request to
Burns Doane Swecker & Mathis L.L.P.
Grant William
Mitsubishi Electric & Electronics USA, Inc
Rao Sheela S.
LandOfFree
General purpose data communications protocol converter does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with General purpose data communications protocol converter, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and General purpose data communications protocol converter will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2475084