Pressure sensor

Details Pressure sensor Pressure sensor

1980-01-30

1981-06-30

Albritton, C. L.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

73727, 338 42, G01L 122

Patent

active

042765331

ABSTRACT:
A diaphragm assembly includes a silicon diaphragm block which has a diaphragm at an eccentric position thereof, a diffused resistor formed as a pressure-sensitive element on a front surface of the diaphragm, and a silicon support plate bonded to the diaphragm block so as to cover a back surface of the diaphragm. The diaphragm assembly is accommodated sealingly within and bonded to the inside of a hollow package at an end portion of the assembly remote from the diaphragm in the direction of extension of the bonded surfaces of the block and the support plate. The front surface of the diaphragm and the diffused resistor thereon are exposed to a vacuum while a fluid pressure subject to measurement is introduced through a passage extending through the package and the end portion of the assembly bonded to the package so as to arrive at a back surface of the diaphragm.

REFERENCES:
patent: 4021766 (1977-05-01), Aine
patent: 4040297 (1977-08-01), Karsmakers
patent: 4129042 (1978-12-01), Rosvold
patent: 4135408 (1979-01-01), DiGiovanni

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