Optical elements for use in spectroscopic ellipsometer and polar

Details Optical elements for use in spectroscopic ellipsometer and polar Optical elements for use in spectroscopic ellipsometer and polar

1997-12-23

1999-08-31

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

356369, G01N 2121

Patent

active

059460989

ABSTRACT:
Disclosed are optical elements for use in ellipsometer/polarimeter systems which do not introduce significant deviation and/or displacement into the propagation direction of a beam of electromagnetic radiation caused to interact therewith, even when said optical elements are caused to continuously rotate. Specifically disclosed is a Polarizer system with a high extinction ratio which can be used at infrared wavelengths, as well as a number of retarder systems with retardation vs. wavelength dispersion characteristics which are within a range of acceptability. In addition, certain disclosed optical elements demonstrate limited immunity to beam alignment changes.

REFERENCES:
patent: 548495 (1895-10-01), Abbe
patent: 2447828 (1948-08-01), West
patent: 2815452 (1957-12-01), Mertz
patent: 3428388 (1969-02-01), Huebler et al.
patent: 3439968 (1969-04-01), Hansen et al.
patent: 3817624 (1974-06-01), Martin
patent: 4053232 (1977-10-01), Dill et al.
patent: 4221464 (1980-09-01), Pedinoff et al.
patent: 4556292 (1985-12-01), Mathyssek et al.
patent: 4733926 (1988-03-01), Title
patent: 4961634 (1990-10-01), Chipman et al.
patent: 5016980 (1991-05-01), Waldron
patent: 5177635 (1993-01-01), Keilmann
patent: 5187611 (1993-02-01), White et al.
patent: 5402260 (1995-03-01), Tsuneda et al.
patent: 5475525 (1995-12-01), Tournois et al.
patent: 5548427 (1996-08-01), May
patent: 5872630 (1999-02-01), Johs et al.

Affiliated with

Also associated with

Rating

Optical elements for use in spectroscopic ellipsometer and polar does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical elements for use in spectroscopic ellipsometer and polar, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical elements for use in spectroscopic ellipsometer and polar will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2427714