Thermodynamically stable photoactive compound

Details Thermodynamically stable photoactive compound Thermodynamically stable photoactive compound

1998-05-20

1999-08-31

Chu, John S.

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazooxide or diazotate

430192, 430193, C07C24512, G03F 7023

Patent

active

059455160

ABSTRACT:
A method for converting a kinetically stable multiester of a naphthoquinone and an o-quinone diazide sulfonyl halide to a thermodynamically stable compound. The method comprises the steps of dissolving a phenol having at least two free phenolic hydroxyl groups and an o-naphthoquinone diazide sulfonyl halide in an aprotic solvent in the presence of a strong base, there being at least one mole of said naphthoquinone diazide sulfonyl halide per mole of phenol, reacting said phenol with said o-napthoquinone diazide sulfonyl halide until essentially of said o-naphthoquinone diazide sulfonyl halide is reacted with said polyhydroxy phenol, and following completion of said reaction, permitting the reaction product to remain in said solvent for a period of time of at least 15 minutes before recovering said photoactive compound The photoactive compound formed by the process is suitable for the formation of photoresists and is less apt to precipitate from solution during storage.

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