Multiple station crystal growing system and method of using same

Details Multiple station crystal growing system and method of using same Multiple station crystal growing system and method of using same

Filed on

1997-02-27

Date issued

1999-08-31

Examiner

Hiteshew, Felisa

Patent Class

Single-crystal, oriented-crystal, and epitaxy growth processes;

SubClass

Apparatus

SubSubClass

For crystallization from liquid or supercritical state

Other Related Categories

117201, 117202, C30B 3500

Type

Patent

Status

active

Patent number

059448920

Description

ABSTRACT:
A crystal growing system has a plurality of crystal growing stations which are each comprised of a crucible, furnace, vacuum chambers and related equipment which is continuously used during the actual crystal growing process. A central process control console is connected to each crystal growing station so that growing parameters for all stations can be controlled from a single location. A common server unit services all crystal growing stations. The server unit is movable so that it can be positioned at each station both prior to initiating crystal formation and subsequent to completing crystal formation in order to service the station before and after the crystal growing operation. The server unit comprises a movable support structure which can be rolled along a set of tracks to be positioned sequentially adjacent to each station. The server unit includes a main hoist constructed to move a receiving chamber, either alone or together with a transition chamber. A feeder hoist and charge feeder also are included as part of the server unit in order to charge each crystal growing station.

REFERENCES:
patent: 4036595 (1977-07-01), Lorenzini et al.
patent: 4410494 (1983-10-01), Fiegl
patent: 4454096 (1984-06-01), Lorenzini et al.
patent: 5641354 (1997-06-01), Sakauchi et al.

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