Process for producing diamond-like films and apparatus therefor

Details Process for producing diamond-like films and apparatus therefor Process for producing diamond-like films and apparatus therefor

1989-12-27

1992-05-12

Niebling, John F.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

427 38, C01B 3100

Patent

active

051124580

ABSTRACT:
In a process for producing a diamond-like film which comprises introducing a hydrocarbon feed gas or a feed gas capable of producing a hydrocarbon on decomposition or reaction into a vacuum, ionizing the gas, and depositing the same on a substrate to form a diamond-like film thereon, the hydrocarbon gas is passed through a plasma exciter prior to the introduction into the vacuum. An apparatus for practicing the process comprises a plasma exciter means located on a passage through which the hydrocarbon gas is introduced into the vacuum.

REFERENCES:
patent: 4401054 (1983-08-01), Matsuo et al.
patent: 4767608 (1988-08-01), Matsumoto et al.
patent: 4913929 (1990-04-01), Moslehi et al.
patent: 4940015 (1990-07-01), Kobashi et al.

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