Probe for determining p or n-type conductivity of semiconductor

Details Probe for determining p or n-type conductivity of semiconductor Probe for determining p or n-type conductivity of semiconductor

1979-08-24

1981-08-04

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, G01R 3126

Patent

active

042824834

ABSTRACT:
A probe for determining the p or n-type of semiconductor material wherein a conductive wire is positioned for point contact with the semiconductor, forming a diode. The wire is energized by r.f. current passing through a capacitor so that the current is rectified at the diode, charging the capacitor. A voltage comparator is connected to the capacitor for determining the polarity of charge on the capacitor and hence the p or n-type of the semiconductor wafer. The semiconductor is supported on a non-diffusing dielectric over a conductive carrier such that r.f. current passes through the dielectric to the carrier, thereby completing the circuit.

REFERENCES:
1968 Book of ASTM Standards; ASTM Designation: F42-68T; 1968; pp. 536-541.
Poponiak, et al., "Detecting Conductivity-Type . . . ", IBM Tech. Dis. Bull., vol. 14, No. 1, Jun. 1971, p. 100.

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