Method for replacing a deposit shield in an evacuated film formi

Details Method for replacing a deposit shield in an evacuated film formi Method for replacing a deposit shield in an evacuated film formi

Filed on

1991-09-06

Date issued

1992-05-12

Examiner

Beck, Shrive

Patent Class

Material or article handling

SubClass

Apparatus for moving intersupporting articles into, within,...

SubSubClass

Stack forming apparatus

Other Related Categories

118715, 118719, 118733, 20429811, 414217, 4272481, 427294, C23C 1600

Type

Patent

Status

active

Patent number

051121859

Description

ABSTRACT:
A film forming apparatus for forming a film on a substrate set inside a film forming chamber capable of being evacuated comprises; a film forming chamber in which a film is formed on a substrate; a deposit shield member to prevent deposits from being adhered on the inner wall surface of the film forming chamber; a vacuum chamber capable of being evacuated and in which the deposit shield member is changed for new one; an open-shut device provided between the vacuum chamber and the film forming chamber, to keep airtightness between the vacuum chamber and the film forming chamber; and a carrying device to carry the deposit shield member between the vacuum chamber and the film forming chamber. Deposit shield members are changed while a vacuum is maintained continuously in the film forming chamber.

REFERENCES:
patent: 3646454 (1972-04-01), Shrader
patent: 4666734 (1987-05-01), Kamiya et al.
patent: 4696833 (1987-09-01), Monnig et al.
patent: 4699805 (1987-10-01), Seelback et al.
patent: 4763602 (1988-08-01), Madan et al.
patent: 4824545 (1989-04-01), Arnold et al.
patent: 4825808 (1989-05-01), Takahashi et al.
Horky, G., "Evaporator-Sputter Shield", IBM Technical Disclosure Bulletin, vol. 23, No. 6 (Nov. 1980) p. 2548.

Affiliated with

Also associated with

Rating

Method for replacing a deposit shield in an evacuated film formi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for replacing a deposit shield in an evacuated film formi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for replacing a deposit shield in an evacuated film formi will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2424628