Method of image enhancement for the coherence probe microscope w

Details Method of image enhancement for the coherence probe microscope w Method of image enhancement for the coherence probe microscope w

1990-03-02

1992-05-12

Turner, Samuel

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356358, 382 43, G01B 902

Patent

active

051121298

ABSTRACT:
A method whereby the image produced in a coherence probe microscope is modified by means of a certain specific additive electronic transformation for the purpose of improving the measurement of selected features. The technique improves measurement accuracy on optically complex materials, in particular it improves the accuracy of linewidth measurement on semiconductor linewidths.

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