Self-supporting insulated conductor arrangement suitable for arr

Details Self-supporting insulated conductor arrangement suitable for arr Self-supporting insulated conductor arrangement suitable for arr

1993-12-13

1995-07-18

Nimmo, Morris H.

Electricity: conductors and insulators

With fluids or vacuum

With cooling or fluid feeding, circulating or distributing

174 24, 174 683, 174 99R, 174110R, 31511181, H01B 734, H01J 724

Patent

active

054343534

ABSTRACT:
A self-supporting electric conductor arrangement, in particular a coil, suitable for arrangement in a vacuum container, contains, as a supporting structure, a tube (18a) of insulating material, e.g. quartz glass, in which is arranged an electric conductor (18b) in the form of a flexible chord or an electrically conducting layer precipitated on the inner wall of the tube. A preferred field of application is a coil-shaped insulated antenna situated in the plasma for a high frequency plasma generator.

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"Development of Radio Frequency Induction Plasma Generators for Neutral Bs", by W. F. DiVergillo, et al., American Institute of Physics, Rev.Sci.Instrum. 57(7), Jul. 1986.
"Performance Characteristics of a Capacitively Coupled 3 cm rf ion Source", by D. Korzec, et al., American Institute of Physics, Rev.Sci.Instrum. 63(5), May 1992.

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