Vapor diffusion pump

Details Vapor diffusion pump Vapor diffusion pump

1976-12-06

1978-04-25

Freeh, William L.

Pumps

One fluid pumped by contact or entrainment with another

Jet

F04C 1900

Patent

active

040860310

ABSTRACT:
A diffusion pump is provided in which an internal vacuum chamber is surrounded by regions of the pump through which working vapors flow. This configuration enables a single heating unit to heat both the working fluid of the pump and the vacuum chamber.
In certain embodiments, a differential pump is provided in which a common boiler provides working fluid for a pair of pumping sections, each of which evacuates a different vacuum chamber. Application of this pump to a gas chromatograph/mass spectrometer system permits operation with relatively large gas throughput while maintaining a relatively low pressure chamber for the mass spectrometer ion source and a much lower pressure chamber for the mass analyzer.

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