Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1992-07-29
1994-05-10
Warden, Robert J.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356400, 250561, 250563, G01N 2100
Patent
active
053112750
ABSTRACT:
An apparatus and method for observing the location of minute particles on a substrate and adjusting for any inclination of the substrate surface is provided. A support station can mount a substrate for movement in both the X and Y planes and in the vertical plane. A laser scanning optical device can determine the locations of minute particles. The coordinates of any inclination of support surface is determined and is used to vary the particle positions so that a subsequent examination by a microscope will be easily accomplished with an in-focus position.
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Hagiwara Takashi
Ishihara Masaaki
Taniguchi Minoru
Horiba Ltd.
Tran Hien
Warden Robert J.
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