Semiconductor testing device

Details Semiconductor testing device Semiconductor testing device

1983-03-31

1989-01-17

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 324158F, G01R 106, G01R 3102

Patent

active

047990090

ABSTRACT:
A wafer testing device in which a plurality of wafers can be tested simultaneously significantly reducing the time required for testing each chip. A prober is provided which receives a wafer to be tested. A probe card is coupled to the prober having a window through which a plurality of semiconductor memory chips on the wafer are observable. A plurality of probes are coupled to the periphery of the window in such a manner that the probes can be brought into contact with bonding pads on the plurality of semiconductor memory chips. A tester is connected to the probes which is capable of simultaneously testing each of the plurality of chips.

REFERENCES:
patent: 3702439 (1972-11-01), McGahey et al.
patent: 3849728 (1974-11-01), Evans

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