Multi-level wiring structure having an organic interlayer insula

Electricity: conductors and insulators – Conduits – cables or conductors – Preformed panel circuit arrangement

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Details

174257, 174262, 361767, 361772, 361784, H05K 100

Patent

active

053109651

ABSTRACT:
To perform a stable wire bonding connecting against a multi-level wiring board using an organic material for the interlayer insulating film, a silicon oxide film and organic interlayer insulating films, for example, polyimide layers, and the first to the fourth level wirings, including a nickel layer by plating are formed on the surface of the silicon substrate as a base in order. By adjusting the thickness of the nickel layer in the wiring, the total Vickers hardness from the substrate to each wiring is adjusted to more than 100, respectively.

REFERENCES:
patent: 4125648 (1978-11-01), Vratny
patent: 4541035 (1985-09-01), Carlson et al.
patent: 5111278 (1992-05-01), Eichelberger
patent: 5144747 (1992-09-01), Eichelberger
patent: 5152869 (1992-10-01), Ferraris et al.

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