Diamond-LiTaO.sub.3 surface acoustic wave device

Details Diamond-LiTaO.sub.3 surface acoustic wave device Diamond-LiTaO.sub.3 surface acoustic wave device

1996-06-07

1997-07-08

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313R, 310360, H03H 900, H01L 4108

Patent

active

056464681

ABSTRACT:
The present invention directed to a SAW device comprising a diamond layer and an LiTaO.sub.3 layer, which can be operated at the frequency of 3 GHz or higher, with superior durability and less energy loss. The SAW device for 1st mode surface acoustic wave of a wavelength .lambda. (.mu.m) according to the present invention comprises: a diamond layer, an interdigital transducer formed onto the diamond layer, and a polycrystalline C-axis-oriented LiTaO.sub.3 layer formed over the interdigital transducer; wherein the SAW device satisfies a relationship of 0.4.ltoreq.kh.sub.1 .ltoreq.1.2, where a parameter kh.sub.1 is defined as kh.sub.1 =2.pi.(t.sub.1 /.lambda.), and t.sub.1 (.mu.m) is the thickness of the LiTaO.sub.3 layer.

REFERENCES:
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patent: 5320865 (1994-06-01), Nakahata et al.
patent: 5329208 (1994-07-01), Imai et al.
patent: 5402029 (1995-03-01), Nakamura et al.
patent: 5426340 (1995-06-01), Higaki et al.

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