Ni-fe thin-film temperature sensor

Electrical resistors – Resistance value responsive to a condition – Ambient temperature

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338308, H01C 304

Patent

active

043718612

ABSTRACT:
A permalloy thin film temperature sensing element in which the NiFe film material is deposited on a substrate in very narrow lines less than about 15 .mu.m wide and in film thicknesses in excess of about 400A.degree. preferably in the range of 1600.degree.-3200A.degree..

REFERENCES:
patent: 3621567 (1971-11-01), Hasegawa et al.
patent: 4081315 (1978-03-01), Templon
patent: 4135179 (1979-01-01), Snyder
patent: 4288776 (1981-09-01), Holmes

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