High power linear pulsed beam annealer

Electric heating – Metal heating – By arc

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Details

219121ER, 219121ES, 219121ET, 219121EU, 250396R, 250396ML, 2504923, 3133611, 3133631, 315 535, 315 541, 315 17, B23K 1500, H05H 706

Patent

active

043717748

ABSTRACT:
A high power pulsed electron beam is produced in a system comprised of an electron gun having a heated cathode, control grid, focus ring, and a curved drift tube. The drift tube is maintained at a high positive voltage with respect to the cathode to accelerate electrons passing through the focus ring and to thereby eliminate space charge. A coil surrounding the curved drift tube provides a magnetic field which maintains the electron beam focused about the axis of the tube and imparts motion on electrons in a spiral path for shallow penetration of the electrons into a target. The curvature of the tube is selected so there is no line of sight between the cathode and a target holder positioned within a second drift tube spaced coaxially from the curved tube. The second tube and the target holder are maintained at a reference voltage that decelerates the electrons. A second coil surrounding the second drift tube maintains the electron beam focused about the axis of the second drift tube and compresses the electron beam to the area of the target. The target holder can be adjusted to position the target where the cross section of the beam matches the area of the target.

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patent: 4283631 (1981-08-01), Turner

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