X-ray thickness gauge

Details X-ray thickness gauge X-ray thickness gauge

1995-08-11

1997-04-08

Wong, Don

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

378 84, G21K 106

Patent

active

056195486

ABSTRACT:
A monochromator positioned in the path of a plurality of X-rays to simultaneously impinge the plurality of X-rays onto a thin-film at various angles of incidence, typically greater than a critical angle .psi..sub.c. The monochromator may be cylindrically or toroidally shaped, defining two focal areas with a source of X-rays positioned at the first focal point and a sample containing the thin-film layer positioned at the second focal point. A position sensitive detector is positioned to sense monochromatic X-rays reflected from the thin-film and produce a signal corresponding to both intensity and an angle of reflection of the monochromatic X-rays sensed. A processor is connected to receive signals produced by the detector to determine, as a function of intensity and angle of reflection of the monochromatic X-rays impinging on the detector, various properties of the structure of the thin-film layer, including the thickness, density and smoothness.

REFERENCES:
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patent: 5003569 (1991-03-01), Okada et al.
patent: 5291269 (1994-03-01), Ledger
patent: 5293214 (1994-03-01), Ledger
T. C. Huang and W. Parrish, "Characterization of Single-and Multiple-Layer Films by X-Ray Reflectometry", Advances in X-Ray Analysis, vol. 35, pp. 137-142 (1992).
Louis N. Koppel, "Direct X-Ray Response of Self-Scanning Photodiode Arrays", Advances in X-Ray Analysis, vol. 19, pp. 587-596 (1975).
R. A. Cowley and T. W. Ryan, "X-ray scattering studies of thin films and surfaces: thermal oxides on silicon", J. Phys.D, vol. 20, pp. 61-68 (1987) .

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