Three dimensional structures of active and passive semiconductor

Details Three dimensional structures of active and passive semiconductor Three dimensional structures of active and passive semiconductor

1984-12-19

1987-05-05

James, Andrew J.

357 60, H01L 2142, H01L 21461, H01L 2904

Patent

active

046636480

ABSTRACT:
The disclosure relates to a three dimensional semiconductor structure formed in a semiconductor substrate wherein electrical components, both active and passive, are formed on the substrate surface as well as in grooves formed in the substrate at an angle and extending to the surface. The substrate surface is designed to lie in a predetermined crystallographic plane of the substrate material and the grooves extend in a predetermined crystallographic direction from said plane, this being accomplished by orientation dependent etching.

REFERENCES:
patent: 4065742 (1977-12-01), Kendall et al.

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