Compound semiconductor device

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357 22, 357 4, H01L 2712

Patent

active

048231711

ABSTRACT:
A compound semiconductor device having a channel layer which is fabricated by alternately laminating an In.sub.x Ga.sub.1-x As compound semiconductor layer (0.7.ltoreq.x.ltoreq.1.0) with thickness of 16 atomic planes or less, and an In.sub.y Ga.sub.1-y As compound semiconductor layer (0.ltoreq.y.ltoreq.0.3) with thickness of 14 atomic planes or less, so that the thickness of the former is greater than that of the latter, in which n-type impurities are doped only in the In.sub.y Ga.sub.1-y As layer (0.ltoreq.y.ltoreq.0.3) side, and a ratio In/Ga on the whole is set at 1.1 or higher.

REFERENCES:
patent: 4424525 (1984-01-01), Mimura
patent: 4471367 (1984-09-01), Chen
patent: 4607272 (1986-08-01), Osburn
patent: 4652896 (1987-03-01), Das
patent: 4663643 (1987-05-01), Mimura
patent: 4665415 (1987-03-01), Esaki
patent: 4672406 (1987-06-01), Sawada

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