Fishing – trapping – and vermin destroying
Patent
1987-11-18
1989-04-18
Roy, Upendra
Fishing, trapping, and vermin destroying
118719, 437939, H01L 21324, H01L 2120
Patent
active
048227560
ABSTRACT:
The present invention comprises a reaction furnace including a fixed capsule having an air atmosphere to be replaced with a predetermined atmosphere, with a semiconductor member to be treated placed therein. A movable capsule initially receives the member and has an atmosphere replaced with a predetermined one before the member to be treated is transferred to the fixed capsule. The movable capsule receives the member at a receiving location and is moved to a delivery location where it is connected to a loading chamber. A method of operating the reaction furnace is also disclosed.
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Mitsubishi Denki & Kabushiki Kaisha
Roy Upendra
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