Chemistry: electrical and wave energy – Processes and products
Patent
1986-10-30
1988-09-27
Ball, Michael W.
Chemistry: electrical and wave energy
Processes and products
73718, 73724, 296211, 437901, 437921, 361283, 148DIG12, G01L 912
Patent
active
047739720
ABSTRACT:
A method of bonding two silicon wafers each having a capacitive plate. Two highly-doped electrically semiconductive feedthrough paths are formed through one wafer, each path contacting one of the capacitive plates. A glass layer is formed on one of the silicon wafers where bonding is desired between the two wafers. The glass layer is anodically bonded to the other of the silicon layers.
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Abolins Peter
Aftergut Jeff H.
Ball Michael W.
Ford Motor Company
Zerschling Keith L.
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