Monocrystal rod conveying apparatus

Material or article handling – Elevator or hoist and loading or unloading means therefor – Grab

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422249, 414591, 901 17, 901 21, 901 39, C30B 1500

Patent

active

051764903

ABSTRACT:
The present invention relates to a device 32 for taking out a grown monocrystal rod 22 from monocrystal pulling up devices 10 to 14 and conveying them to a predetermined position. An object is to simplify the overall structure, which includes a plurality of monocrystal pulling up devices 10 to 14, and reducing the overall cost. A rail 31 is disposed along the monocrystal pulling up devices 10 to 14 and travelling portions 33 and 34 travel along the rail 31. The upper end portion of an upper cylinder 36 is fixed to the travelling portions 33 and 34, the upper portion of an elevational shaft 37 is inserted into the upper cylinder 36, the lower portion of the elevational shaft 37 is inserted into a lower cylinder 39 and a plate 44 is able to approach and move away from the lower cylinder 39. A plate 45 is able to rotate around a shaft 46 with respect to the position of the plate 44. Futhermore, the plate 45 has a receiving finger 53A and a holding finger 54A.

REFERENCES:
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patent: 4005782 (1977-02-01), Crockett
patent: 4132318 (1979-01-01), Wang et al.
patent: 4350560 (1982-09-01), Helgeland et al.
patent: 4410494 (1983-10-01), Fiegl
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patent: 4904153 (1990-02-01), Iwasawa et al.
patent: 5028195 (1991-07-01), Ishii et al.
Helgeland, W. et al., "Apparatus for and Method of Handling Crystals From Crystal-Growing Furnaces", Int. Pub. No. WO82/04074, Int. Appl. No. PCT/US81/00668, 16 pp., 25 November 1982.
"Silicon Crystal Removal Tool", IBM Technical Disclosure Bulletin vol. 30, No. 10, Mar. 1988, pp. 102-103.

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